General specifications of pachaging for electron optical instrument 電子光學儀器包裝通用技術條件
Electron optical system of epma 電子探針的電子光學系統(tǒng)
Design of electron optical system for electron gun for electron beam welding 電子束焊接電子槍電子光學系統(tǒng)設計
Introduce oxygen environment in general sem ( sample chamber in high vacuum of 2 10 - 3 ( 4 10 - 2 pa ) , and directly observe and analyze materials ( no conductive films ) , simultaneously , keep original electron optical and detecting system unchanged 在常規(guī)掃描電子顯微鏡( sem )中引入一定的氧氣(樣品室真空度仍維持在2 10 - 3 ( 4 10 - 2pa ) ,直接觀察和分析非導電樣品,而不需要在樣品表面鍍導電膜。
A highly efficient numerical algorithm by using multi - grid method ( mgm ) is introduced to solve the three dimensional field distribution in the present paper . formulae of the restriction and prolongation in mgm computation is deduced , and a 3d program of mgm is accomplished , which can solve the field distributions in electron optical systems for various electrostatic lenses . the 3d field distribution in an electrostatic concentric spherical model is tested with mgm algorithm and an algorithm based on finite difference method ( fdm ) respectively . comparing these two results in view of computational efficiency and computational accuracy , it appears that mgm is superior to fdm in solving electrostatic field distribution for the electron optics problem . this paper shows that the 3d field computation using mgm greatly improves the computational efficiency of field distributions in electron optical systems and shortens the computational time 本文將一種高效率的數(shù)值計算方法? ?多重網格法引入三維靜電場分布的計算,多重網格法利用限制和延拓可迅速求得滿足精度要求的場分布.研究了求解各種靜電透鏡電子光學系統(tǒng)三維場分布的多重網格法程序,驗算了靜電同心球模型的三維場分布.通過與目前在場計算中常用的有限差分法進行比較,可以看出多重網格法的計算效率和計算精度優(yōu)于有限差分法.本文表明利用多重網格法計算三維場大大提高了場分布的計算效率,縮短了計算時間,因此為后續(xù)計算打下了良好的基礎